Constructing the next transistor , in EE Times, is a superb article describing the technical challenges to building useful transistors below 65nm. It covers the physical and materials challenges that are arising, and how the solution to one problem (e.g., low leakage power) may aggravate another (high performance).
I'd love to have seen this illustrated with some pictures -- I wonder if the print edition has that? In any case, if you're a semiconductor engineer or scientist, you'll find this article worthwhile.
Why, it even makes me want to dust off my semiconductor textbooks to remember what's really going on inside a MOS transistor!